Thin film resonator technology

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 52, Issue 5, 2005, Pages 707-716

  Lakin, Kenneth M ^a  

^a TFR Technologies Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROWAVE FREQUENCIES; MICROWAVE FREQUENCY RESONATORS; THIN FILM RESONATOR TECHNOLOGY; THIN PIEZOELECTRIC PLATES;

ALUMINUM NITRIDE; BANDWIDTH; CONTROL SYSTEMS; ELECTRIC FREQUENCY CONTROL; MICROELECTRONICS; MICROWAVES; NATURAL FREQUENCIES; THIN FILMS; WIRELESS TELECOMMUNICATION SYSTEMS; ZINC OXIDE;

RESONATORS;

EID: 23844524171     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1503959     Document Type: Review

References (46)

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