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Volumn , Issue , 2003, Pages 157-161
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RF-MEMS filters manufactured on silicon: Key facts about bulk-acoustic-wave technology
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Author keywords
Bandwidth; Filters; Manufacturing; Mobile handsets; Monolithic integrated circuits; Process design; Radiofrequency integrated circuits; Radiofrequency microelectromechanical systems; Silicon; System on a chip
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Indexed keywords
ACOUSTIC WAVES;
APPLICATION SPECIFIC INTEGRATED CIRCUITS;
BANDWIDTH;
CELLULAR TELEPHONE SYSTEMS;
ELECTROMECHANICAL DEVICES;
ELECTROMECHANICAL FILTERS;
FILTERS (FOR FLUIDS);
INTEGRATED CIRCUITS;
MANUFACTURE;
MEMS;
MICROPROCESSOR CHIPS;
MOBILE TELECOMMUNICATION SYSTEMS;
PROCESS DESIGN;
SILICON;
SYSTEM-IN-PACKAGE;
SYSTEM-ON-CHIP;
TELEPHONE SETS;
BULK ACOUSTIC WAVE TECHNOLOGY;
MOBILE HANDSETS;
MOBILE PHONE APPLICATIONS;
MONOLITHIC INTEGRATION;
RADIO FREQUENCIES;
RADIO FREQUENCY INTEGRATED CIRCUITS;
SILICON-BASED TECHNOLOGY;
SYSTEM ON A CHIP;
MONOLITHIC INTEGRATED CIRCUITS;
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EID: 28344447352
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/SMIC.2003.1196694 Document Type: Conference Paper |
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Times cited : (11)
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References (5)
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