Modeling and simulation of the thin film bulk acoustic resonator

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2002, Pages 40-44

  Salgar, Sushant ^a   Kim, Guntae ^a   Han, Dae Hyun ^a,b   Kim, Bruce ^a  

^a Arizona State University   (United States)

^b Dong Eui University   (South Korea)

Author keywords

BAW Resonator; Bragg reflector; TFBAR

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ELECTRODES; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; THIN FILMS;

BRAGG REFLECTORS;

ACOUSTIC RESONATORS;

EID: 0036442304     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. K.M. Lakin, "Modeling of Thin Film Resonators and filters", IEEE transactions on Microwave theory and techniques, December 1992.
2. Kenneth M. Lakin, Gerald R. Kline and Kevin T. McCarron, "High-Q Microwave Acoustic Resonators and Filters", IEEE transactions on Microwave theory and techniques, vol. 41, NO.12, December 1993.
3. K.M Lakin, G.R. Kline and K.T. McCarron, "Development of miniature filters for wireless applications", IEEE transactions on Microwave theory and techniques, vol. 43, NO.12, December 1995.
4. B.A. Auld, "Acoustic Fields and waves in solids".
5. Lutsky, J.J., Naik, R.S., Reif, R., Sodini, C.G., "A sealed cavity TFR process for RF bandpass filters" Electron Devices Meeting, 1996, International, 1996 pp. 95-98.
6. Sang-Hyun Park, Byeng-Chul Seo, Hee-Dae Park and Giwan Yoon, "Film Bulk Acoustic Resonator Fabrication for RF Filter Applications." unpublished.
7. S.V. Krishnaswamy, J. Rosenbaum, S. Horwitz, C. Yale and R.A. Moore, "Film Bulk Acoustic Wave Resonator Technology." Ultrasonic Symposium, 1990, pp. 529-536.
8. R. Ruby, P. Merchant, "Micromachined Thin Film Bulk Acoustic Resonators" IEEE International Frequency Control Symposium, pp. 135-138.