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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 7 A, 2000, Pages 4115-4119

Film bulk acoustic resonator fabrication for radio frequency filter applications

(4) Park, Sang Hyun a Seo, Byeng Chul a Park, Hee Dae b Yoon, Giwan a

a Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

b Sang Shin Electric Co Ltd (South Korea)

Author keywords

FBAR; Piezoelectric ZnO film; Return loss; Two step deposition

Indexed keywords

ELECTRIC FILTERS; FILM GROWTH; OXYGEN; PIEZOELECTRIC MATERIALS; RESONANCE; RESONATORS; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICE MANUFACTURE; SPUTTER DEPOSITION;

FILM BULK ACOUSTIC RESONATOR DEVICES; PIEZOELECTRIC ZINC OXIDE FILMS; RADIO FREQUENCY FILTER; RETURN LOSS;

SEMICONDUCTING ZINC COMPOUNDS;

EID: 0034215856 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.39.4115 Document Type: Article

Times cited : (40)

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