On the role of ion flux in nanostructuring by ion sputter erosion

Nanotechnology

Volumn 16, Issue 9, 2005, Pages 1526-1529

  Fan, Wen Bin ^a   Li, Wei Qing ^a   Qi, Le Jun ^a   Sun, Hai Tong ^a   Luo, Jia ^a   Zhao, You Yuan ^a   Lu, Ming ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EROSION; NANOSTRUCTURED MATERIALS; POSITIVE IONS; SEMICONDUCTING GALLIUM COMPOUNDS; SINGLE CRYSTALS; SPUTTERING; SURFACE ROUGHNESS;

BRADLEY-HARPER (BH) MODEL; ION FLUX; ION SPUTTER EROSION; NANOSTRUCTURING;

SEMICONDUCTING SILICON;

EID: 23344454911     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/16/9/020     Document Type: Article

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