Residual strain measurements in InGaAs metamorphic buffer layers on GaAs

European Physical Journal B

Volumn 56, Issue 3, 2007, Pages 217-222

  Bellani, V ^a   Bocchi, C ^b   Ciabattoni, T ^a   Franchi, S ^b   Frigeri, P ^b   Galinetto, P ^a   Geddo, M ^c   Germini, F ^b   Guizzetti, G ^a   Nasi, L ^b   Patrini, M ^a   Seravalli, L ^b   Trevisi, G ^b  

^a UNIVERSITY OF PAVIA   (Italy)

^b IMEM CNR   (Italy)

^c UNIVERSITY OF PARMA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

METAMORPHIC BUFFERS; RECIPROCAL SPACE MAP;

BUFFER LAYERS; PHONONS; SCATTERING; STRAIN MEASUREMENT; STRAIN RELAXATION; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 34248146579     PISSN: 14346028     EISSN: 14346036     Source Type: Journal    
DOI: 10.1140/epjb/e2007-00105-8     Document Type: Article

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