Iterative algorithm for automatic alignment by object transformation

Microelectronics Reliability

Volumn 47, Issue 6, 2007, Pages 972-985

  Kim, Hyong Tae ^a   Yang, Hae Jeong ^b   Baek, Seung Yub ^c  

^a Research Center   (South Korea)

^b Korea Polytechnic University   (South Korea)

^c Inha University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; AUTOMATION; CONVERGENCE OF NUMERICAL METHODS; FABRICATION; ITERATIVE METHODS; MATHEMATICAL MODELS;

ALIGNMENT ALGORITHMS; ITERATIVE ALGORITHMS; NON IDEAL CONDITIONS; OBJECT TRANSFORMATION;

WAFER BONDING;

EID: 34247846254     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2006.06.008     Document Type: Article

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