Iterative algorithm for automatic alignment by object transformation

Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05

Volumn 2005, Issue , 2005, Pages 652-656

  Kim, H T ^a   Song, C S ^a   Yang, H J ^b  

^a Hanyang University   (South Korea)

^b Korea Polytechnic University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CONTAMINATION; DUST; ITERATIVE METHODS; MATHEMATICAL MODELS; MATRIX ALGEBRA;

ALIGNMENT ALGORITHM; ALIGNMENT MARKS; AUTOMATIC ALIGNMENT; OBJECT TRANSFORMATION;

WSI CIRCUITS;

EID: 33748893972     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMECH.2005.1529338     Document Type: Conference Paper

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