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Volumn 171, Issue 2, 2006, Pages 319-329
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A new algorithm for a three-axis auto-alignment system using vision inspection
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Author keywords
Auto alignment; Characteristic matrix; Charge coupled device (CCD); Fiducial mark
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Indexed keywords
ALIGNMENT;
CHARGE COUPLED DEVICES;
FEEDBACK;
MATRIX ALGEBRA;
SIGNAL PROCESSING;
VISION;
AUTO-ALIGNMENT;
CHARACTERISTIC MATRIX;
FIDUCIAL MARK;
ALGORITHMS;
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EID: 30144440084
PISSN: 09240136
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jmatprotec.2005.06.080 Document Type: Article |
Times cited : (6)
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References (12)
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