Convergence analysis of wafer alignment algorithm based on object transformation

2006 1st IEEE Conference on Industrial Electronics and Applications

Volumn , Issue , 2006, Pages

  Kim, Hyungtae ^a   Yang, Haejeong ^b   Kim, Sungchul ^a  

^a AM Technology   (South Korea)

^b Korea Polytechnic University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; CONVERGENCE OF NUMERICAL METHODS; ERROR ANALYSIS; ITERATIVE METHODS; MATHEMATICAL TRANSFORMATIONS;

CONVERGENCE ANALYSIS; CONVERGENCE SPEED; OBJECT TRANSFORMATION; WAFER ALIGNMENT ALGORITHMS;

ALGORITHMS;

EID: 37649027470     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICIEA.2006.257283     Document Type: Conference Paper

References (11)

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