Plasma processes for membrane modification or manufacture

Annales de Chimie: Science des Materiaux

Volumn 32, Issue 2, 2007, Pages 145-158

  Durand, Jean ^a,b   Rouessac, Vincent ^a   Roualdes, Stéphanie ^a  

^a UNIV MONTPELLIER   (France)

^b UNIVERSITÉ DE MONTPELLIER   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; ETCHING; GRAFTING (CHEMICAL); HYDROPHOBICITY; MICROELECTRONICS; POLYMERIC MEMBRANES; THERMODYNAMIC STABILITY;

CHEMICAL STABILITIES; FLUOROCARBON PLASMAS; GASEOUS PRECURSOR; PLASMA PROCESSES;

PLASMAS;

EID: 34247266600     PISSN: 01519107     EISSN: None     Source Type: Journal    
DOI: 10.3166/acsm.32.145-158     Document Type: Article

References (42)

1. H. Yasuda, Plasma Polymerisation (Academic Press Inc, New York, 1985).
2. T-S. Cheng, H-T. Lin, M-J. Chuang, Surface fluorination of polyethylene terephtalate films with RF plasma, Mater. Lett. 58 (5) (2004) 650-653.
3. S. Marais, M. Metayer, F. Poncin-Epaillard, Effect of a plasma treatment on water diffusivity and permeability of an unsatured polyester resin, J. Fluorine Chem. 107 (2) (2001) 199-203.
4. 4 glow discharge, Thin Solid Films 241 (1-2) (1994) 295-300.
5. A. Doucoure, C. Guizard, J. Durand, R. Berjoan, L. Cot, Plasma polymerization of fluorinated monomers on mesoporous silica membranes and application to gas permeation, J. Membr. Sci. 117 (1996) 143-150.
6. F. Poncin-Epaillard, B. Pomepui, J.C. Brosse, Study of polymer treatment with tetrafluoromethane plasma: reactivity of fluorinated species on model surfaces, J. Polym. Sci.: part A, Pol. Chem. 31 (1993) 2671-2680.
7. A. Dilks, E. Kay, Plasma polymerization of ethylene and the series of fluoroethylenes: plasma effluent mass spectroscopy and ESCA studies, Macromolecules 14 (1981) 855-862.
8. 4 glow discharge plasmas, J. Polym. Sci.: part A, Pol. Chem. 32 (1994) 1829-1837.
9. 4/Ar plasma, Appl. Surf. Sci. 187 (2002) 326-338.
10. 2-SiON planar waveguides deposited by PECVD method, Surf. Coat. Technol. 174-175 (2003) 166-169.
11. T. Storgaard-Larsen, O. Leistiko, Plasma-enhanced chemical vapor deposited silicon oxynitride films for optical waveguide bridges for use in mechanical sensors, J. Electrochem. Soc. 144 (4) (1997) 1505-1513.
12. P. Bankovic, N.R. Demarquette, M.L.P. da Silva, Obtention of selective membranes for water and hydrophobic liquids by plasma enhanced chemical vapor deposition on porous substrates, Mat. Sci. Eng. B 112 (2-3) (2004) 165-170.
13. V. Rouessac, P. Tuluc, J. Durand, Composite plasma-polymerized organosiloxane-based material for hydrocarbon vapor selectivity, J. Membr. Sci. 230 (1-2) (2004) 49-59.
14. F. Bosc, J. Sanchez, V. Rouessac, J. Durand, Sorption and permeation characteristics of hybrid organosilicon thin films deposited by PECVD, Sep. Purif. Technol. 32 (1-3) (2003) 371-376.
15. S. Roualdés, J. Sanchez, J. Durand, Gas diffusion and sorption properties of polysiloxane membranes prepared by PECVD, J. Membr. Sci. 198 (2) (2002) 299-310.
16. S. Roualdès, J. Durand, Experimental design and modelling in the investigation of PECVD parameters effects on the structural and gas transport properties of plasma polysiloxane membranes, J. Membr. Sci. 230 (1-2) (2004) 39-48.
17. Y. Inoue, H. Sugimura, O. Takai, In situ observation of behavior of organosilicon molecules in low-temperature plasma enhanced CVD, Thin Solid Films 345 (1) (1999) 90-93.
18. K. Teshima, Y. Inoue, H. Sugimura, O. Takai, Room-temperature deposition of high-purity silicon oxide films by RF plasma-enhanced CVD, Surf. Coat. Technol. 146-147 (2001) 451-456.
19. V. Rouessac, P. Ferreira, J. Durand, Preparation of silica membranes inside macroporous alumina tubes by PECVD for hydrogen selectivity, Sep. Purif. Technol. 32 (1-3) (2003) 37-43.
20. A. Mourgues, J. Sanchez, S. Roualdès, J. Durand, Correlation and prediction of gas permeability for membranes prepared by PECVD, J. Membr. Sci. 262 (1-2) (2005) 42-48.
21. L. Favennec, V. Jousseaume, V. Rouessac, F. Fusalba, J. Durand, G. Passemard, Porous extreme low k (ELk) dielectrics using a PECVD porogen approach, Mat. Sci. Semicon. Proc. 7 (4-6) (2004) 277-282.
22. P. Revol, D. Perret, F. Bertin, F. Fusalba, V. Rouessac, A. Chabli, G. Passemard, A. Ayral, Porosimetry measurements on low dielectric constant of thin layer by coupling spectroscopic ellipsometry and solvent adsorption-desorption, J. Porous Mat. 12 (2005) 113-121.
23. W. Puyrenier, V. Rouessac, L. Broussous, D. Rebiscoul, A. Ayral, Characterization of the impact of plasma treatments and wet cleaning on a porous low k material, Microelectron. Eng. 83 (2006) 2314-2318.
24. 2 thin films with controlled porosity, Chem. Vap. Depos. 10 (1) (2004) 17-20.
25. X. Pages, V. Rouessac, D. Cot, G. Nabias, J. Durand, Gas permeation of PECVD membranes inside alumina substrate tubes, Sep. Purif. Technol. 25 (1-3) (2001) 399-406
26. R. Zeng, Z. Pang, H. Zhu, Modification of a Nafion® ion exchange membrane by a plasma polymerization process, J. Electroanal. Chem. 490 (1-2) (2000) 102-106.
27. L.J. Hobson, H. Ozu, M. Yamaguchi, S. Hayase, Modified Nafion 117 as an improved polymer electrolyte membrane for direct methanol fuel cells, J. Electrochem. Soc. 148 (10) (2001) A1185-A1190.
28. W.C. Choi, J.D. Kim, S.I. Woo, Modification of proton conducting membrane for reducing methanol crossover in a direct-methanol fuel cell, J. Power Sources 96 (2) (2001) 411-414.
29. S.R. Yoon, G.H. Hwang, W.I. Cho, I.H. Oh, S.A. Hong, H.Y. Ha, Modification of polymer electrolyte membranes for DMFCs using Pd films formed by sputtering, J. Power Sources 106 (1-2) (2002) 215-223.
30. N. Inagaki, S. Tasaka, Z. Chengfei, Preparation of thin films containing sulfonic acid and carboxylic acid groups by plasma polymerization of perfluorobenzene/sulfur dioxide and pefluorobenzene.carbon dioxide mixtures, Polym. Bull. 26 (2) (1991) 187-191.
31. Y. Uchimoto, E. Endo, K. Yasuda, Y. Yamasaki, Z.I. Takehara, Z. Ogumi, O. Kitao, Preparation of thin cation-exchange membranes using glow discharge plasma polymerization and its reactions, J. Electrochem. Soc. 147 (1) (2000) 111-118.
32. L. Mex, M. Sussiek, J. Müller, Plasma polymerized electrolyte membranes and electrodes for miniaturized fuel cells, Chem. Eng. Commun. 190 (9) (2003) 1085-1095.
33. J. Feichtinger, R. Galm, M. Walker, K.M. Baumgärtner, A. Schulz, E. Räuchle, U. Schumacher, Plasma polymerized barrier films on membranes for direct methanol fuel cells, Surf. Coat. Technol. 142-144 (2001) 181-186.
34. F. Finsterwalder, G. Hambitzer, Proton conductive thin films prepared by plasma polymerization, J. Membr. Sci. 185 (1) (2001) 105-124.
35. 2/acetylene, J. Appl. Polym. Sci. 99 (6) (2006) 3692-3699.
36. 2 mixture, J. Polym. Sci.: Part A: Pol. Chem. 27 (10) (1989) 3495-3501.
37. Z. Ogumi, Y. Uchimoto, Z.I. Takehara, A new ultra-thin fluorinated cation exchange film prepared by plasma polymerization, J. Electrochem. Soc. 137 (10) (1990) 3319-3320.
38. P. Brault, S. Roualdès, A. Gaillard, A.L. Thomann, J. Mathias, J. Durand, C. Coutanceau, J.M. Léger, C. Charles, R. Boswell, Solid polymer fuel cell synyhesis by low pressure plasmas : a short review, Eur. Phys. J. Appl. Phys. 34 (2006) 151-156
39. S. Roualdès, I. Topala, H. Mahdjoub, V. Rouessac, P. Sistat, J. Durand, Sulfonated polystyrene-type plasma-polymerized membranes for miniature Direct Methanol Fuel cells, J. Power Sources 158 (2) (2006) 1270-1281.
40. S. Roualdès, M. Schieda, L. Durivault, I. Guesmi, E. Gerardin, J. Durand, Ion-exchange membranes for fuel cells in a micro-scale, accepted in CVD Journal.
41. E. Agel, J. Bouet, J.F. Fauvarque, Characterization and use of anionic membranes for alkaline fuel cells, J. Power Sources 101 (2) (2001) 267-274.
42. M. Schieda, S. Roualdès, J. Durand, A. Martinent, D. Marsacq, Plasma-polymerized thin films as new membranes for miniature solid alkaline fuel cells, Desalination 199 (2006) 286-288.