Sorption and permeation characteristics of hybrid organosilicon thin films deposited by PECVD

Separation and Purification Technology

Volumn 32, Issue 1-3, 2003, Pages 371-376

  Bosc, Florence ^a   Sanchez, José ^a   Rouessac, Vincent ^a   Durand, Jean ^a  

^a CNRS   (France)

Author keywords

Diffusion coefficient; Gas permeability; Plasma polymerization; Polysiloxane membranes; Sorption coefficient

Indexed keywords

DIFFUSION; MECHANICAL PERMEABILITY; SILICON; SORPTION;

HYBRID ORGANOSILICON THIN FILMS;

THIN FILMS;

FILM THICKNESS; MEMBRANE; PERMEABILITY; PLASMA TREATMENT; SORPTION;

EID: 0037908639     PISSN: 13835866     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1383-5866(03)00061-3     Document Type: Article

References (15)

1. Sakata, J., Yamamoto, M., & Hirai, M. (1989). Plasma polymerized membranes and gas permeability IV. J. Appl. Polym. Sci., 37 2773.
2. Inagaki, N. (1993). Gas selective plasma polymerization membrane. Mol. Cryst. Liq. Cryst., 224 123.
3. Matsuyama, H., Shiraishi, T., & Teramoto, M. (1994). Plasma polymerized membranes from organosilicon compounds for separation of oxygen over nitrogen. J. Appl. Polym. Sci., 54 166.
4. Göbig O., Nehlsen, S., & M, J. (1998). Hydrophobic properties of plasma polymerized thin film gas selective membranes. J. Membr. Sci., 138 115.
5. Yasuda, H. (1978). Glow discharge polymerization. In J. Vossen, & W. Kern (Eds.), Thin Film Processes, New York: Academic Press.
6. Roualdes, S., Van der Lee, A., Berjoan, R., Sanchez, J., & Durand, J. (1999). Gas separation properties of plasma polymerized membranes from organosilicon monomers. AIChE J., 45(7), 1566.
7. Roualdes, S., Sanchez, J., & Durand, J. (2002). Gas diffusion and sorption properties of polysiloxane membranes prepared by PECVD. J. Membr. Sci., 198 299.
8. Berjoan, R., Biche, E., Perarnau, D., Roualdes, S., & Durand, J. (1999). J. Phys. IV Fr.. 8 1059.
9. 29Si NMR and Si2p XPS correlations in polysiloxanes prepared by PECVD. Sep. Purf. Technol., 25 391.
10. Shah, V. M., Hardy, B. J., & Stern, S. A. (1993). Solubility of carbon dioxide, methane and propane in silicone polymers. Effect of polymer backbone chains. J. Polym. Sci. Part B: Polym. Phys., 31 313.
11. Mulder, M. (1991). Basic Principles of Membrane Technology. Dordrecht: Kluwer Academic.
12. Merkel, T. C., Bondar, V. I., Nakai, K., Freeman, B. D., & Pinnau, I. (2000). Gas sorption diffusion and permeation in PDMS. J. Polym. Sci., 38 415.
13. Stern, S. A. (1994). Polymers for gas separation: the next decade. J. Membr. Sci., 94 1.
14. Pauli, S. (1989). Permeability and Diffusion Data, Polymer Handbook. In J. Brandrup, & E. H. Immerguit (Eds.), New York: Wiley.
15. Stern, S. A., Shah, V. M., & Hardy, B. J. (1987). Structure-permeability relationships in silicone polymers. J. Polym. Sci. Part B: Polym. Phys., 25 1263.