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Volumn 198, Issue 2, 2002, Pages 299-310
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Gas diffusion and sorption properties of polysiloxane membranes prepared by PECVD
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Author keywords
Diffusion coefficient; Gas permeability; Plasma polymerization; Polysiloxane membranes; Sorption coefficient
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Indexed keywords
DIFFUSION;
GAS PERMEABLE MEMBRANES;
GRAVIMETRIC ANALYSIS;
MASS TRANSFER;
MONOMERS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PLASMA POLYMERIZATION;
SILICONES;
SOLUBILITY;
SORPTION;
THIN FILMS;
TRANSPORT PROPERTIES;
GAS PERMEABILITY;
POLYMERIC MEMBRANES;
CARBON DIOXIDE;
CELLULOSE;
ESTER;
HYDROGEN;
METHANE;
MONOMER;
NITROGEN;
ORGANIC COMPOUND;
POLYSILOXANE;
SILICON;
SILICON DIOXIDE;
DIFFUSION;
GAS SEPARATION;
MEASUREMENT METHOD;
MEMBRANE;
PERMEABILITY;
POLYMERIZATION;
ANALYTIC METHOD;
ARTICLE;
ARTIFICIAL MEMBRANE;
CHEMICAL COMPOSITION;
DENSITY;
FILM;
FLOW RATE;
GAS DIFFUSION;
GRAVIMETRY;
MOLECULAR WEIGHT;
PLASMA;
POLYMERIZATION;
PRIORITY JOURNAL;
SOLUBILITY;
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EID: 0037089733
PISSN: 03767388
EISSN: None
Source Type: Journal
DOI: 10.1016/S0376-7388(01)00667-6 Document Type: Article |
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Times cited : (47)
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References (21)
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