Experimental design and modelling in the investigation of PECVD parameters effects on the structural and gas transport properties of plasma polysiloxane membranes

Journal of Membrane Science

Volumn 230, Issue 1-2, 2004, Pages 39-48

  Roualdès, Stéphanie ^a   Durand, Jean ^a  

^a UNIVERSITÉ DE MONTPELLIER   (France)

Author keywords

Experimental design; PECVD technique; Plasma polysiloxane membrane; Polynomial modelling; Response surface

Indexed keywords

MECHANICAL PERMEABILITY; MOLECULAR STRUCTURE; MONOMERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYNOMIALS; SYNTHESIS (CHEMICAL);

STRUCTURAL TRANSPORT PROPERTIES;

GAS PERMEABLE MEMBRANES;

HEXAMETHYLDISILOXANE; MONOMER; OCTAMETHYLCYCLOTETRASILOXANE; POLYSILOXANE; SILOXANE; UNCLASSIFIED DRUG;

DESIGN; MEMBRANE; MODELING; SURFACE TREATMENT; SYNTHESIS;

ARTICLE; CORRELATION ANALYSIS; GAS TRANSPORT; MEMBRANE FILTER; MODEL; PERMEABILITY; PRIORITY JOURNAL; RELIABILITY; STATISTICAL ANALYSIS; SYNTHESIS;

EID: 0942300632     PISSN: 03767388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.memsci.2003.10.031     Document Type: Article

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