Complementary metal-oxide-semiconductor compatible Al-catalyzed silicon nanowires

Electrochemical and Solid-State Letters

Volumn 10, Issue 6, 2007, Pages 11-13

  Whang, S J ^a   Lee, S J ^a   Yang, W F ^a   Cho, B J ^a   Liew, Y F ^a,b   Kwong, D L ^a,c  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b DATA STORAGE INSTITUTE   (Singapore)

^c INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYST ACTIVITY; CONTAMINATION; EPITAXIAL GROWTH; MOS CAPACITORS; OXIDATION;

METAL CATALYSTS; METAL CONTAMINATION; SURFACE OXIDATION;

NANOWIRES;

EID: 34047266175     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2716304     Document Type: Article

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