A feasibility study of ZnO-based FBAR devices for an ultra-mass-sensitive sensor application

Microwave and Optical Technology Letters

Volumn 42, Issue 6, 2004, Pages 505-507

  Mai, Linh ^a   Kim, Dong Hyun ^a   Yim, Munhyuk ^a   Yoon, Giwan ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

FBAR devices; Q factor; Resonance characteristics; Return loss; ZnO

Indexed keywords

BIOSENSORS; CHEMICAL SENSORS; CRYSTALLINE MATERIALS; INK; METHANOL; MIXTURES; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; QUARTZ; ZINC OXIDE;

FBAR DEVICES; MASS-LOADING EFFECT; RESONANCE CHARACTERISTICS; RETURN LOSS;

ACOUSTIC RESONATORS;

EID: 4444356475     PISSN: 08952477     EISSN: None     Source Type: Journal    
DOI: 10.1002/mop.20351     Document Type: Article

References (5)

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