Fabrication and characterization of ZnO-based film bulk acoustic resonator with a high working frequency

Chinese Physics Letters

Volumn 22, Issue 3, 2005, Pages 694-696

  Zhang, Ting ^a,b,c   Wang, Yu ^a   Liu, Wei Li ^b   Cheng, Jian Gong ^b   Song, Zhi Tang ^b   Feng, Song Lin ^b   Chan Wong, Lai Wa Helen ^a   Choy, Chung Loong ^a  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^c UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; FABRICATION; MULTILAYERS; ZINC OXIDE;

ACOUSTIC RESONANCE; DIELECTRIC MEASUREMENTS; FABRICATION AND CHARACTERIZATIONS; FILM-BULK-ACOUSTIC-RESONATOR; HIGH SENSITIVITY; MULTILAYER STRUCTURES; PIEZOELECTRIC ELEMENTS; WORKING FREQUENCY;

II-VI SEMICONDUCTORS;

EID: 24144442443     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/22/3/048     Document Type: Article

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