Piezoelectrically transduced low-impedance microelectromechanical resonators

Applied Physics Letters

Volumn 87, Issue 15, 2005, Pages 1-3

  Yan, Le ^a   Pang, Wei ^b   Kim, Euk Sok ^b   Tang, William C ^a  

^a University of California at Irvine   (United States)

^b University of Southern California ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INSULATOR WAFER; MICROMECHANICAL RESONATORS;

PIEZOELECTRICITY; RESONATORS; SILICON; SILICON ON INSULATOR TECHNOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 28344454838     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2089152     Document Type: Article

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