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Volumn 352, Issue 9-20 SPEC. ISS., 2006, Pages 998-1002
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Cw argon laser crystallization of silicon films: Structural properties
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Author keywords
Crystallization; Defects; Microcrystallinity
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Indexed keywords
AMORPHOUS SILICON;
CRYSTALLIZATION;
DEPOSITION;
EPITAXIAL GROWTH;
GLASS;
LASER BEAM EFFECTS;
AMORPHOUS STATE;
LASER CRYSTALLIZATION METHOD;
MICROCRYSTALLINITY;
THIN FILMS;
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EID: 33744508542
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2005.11.121 Document Type: Article |
Times cited : (25)
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References (15)
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