Microfabrication of high-temperature silicon devices using wafer bonding and deep reactive ion etching

Journal of Microelectromechanical Systems

Volumn 8, Issue 2, 1999, Pages 152-160

  Mehra, Amit ^a   Ayón, Arturo A ^b   Waitz, Ian A ^a   Schmidt, Martin A ^b  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; COMBUSTION; FUEL INJECTION; GAS ENGINES; HIGH TEMPERATURE OPERATIONS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OXIDATION; REACTIVE ION ETCHING; SILICON WAFERS;

ALIGNED FUSION BONDING; FUEL INJECTOR; HIGH TEMPERATURE SILICON DEVICES; HYDROGEN AIR COMBUSTION; MICRO HEAT ENGINE; MICROCOMBUSTOR; SILICON CREEP; SILICON OXIDATION; TURBINE INLET TEMPERATURE;

COMBUSTORS;

EID: 0345325567     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.767111     Document Type: Article

References (32)

1. A. H. Epstein et al., "Power MEMS and microengines," presented at IEEE Conf. Solid State Sensors and Actuators, 1997.
2. A. H. Epstein and S. D. Senturia, "Macro power from micro machinery," Science, vol. 276, p. 1211, May 23, 1997.
3. Lin et al., "Fabrication of a micro turbine/bearing rig," presented at Late News Poster Session, Solid-State Sensor and Actuator Workshop at Hilton Head, 1998.
4. I. A. Waitz, G. Gauba, and Y.-S. Tzeng, "Combustors for micro-gas turbine engines," ASME J. Fluids Eng., vol. 20, pp. 109-117, Mar. 1998.
5. A. H. Epstein et al., "Micro-heat engines, gas turbines, and rocket engines," presented at 28th AIAA Fluid Dynamics Conf., 1997 (AIAA 97-1773).
6. R. S. Benson and J. W. Ponton, "Process miniaturization - A route to total environmental acceptability," Trans. IChemE 71 A, 1993, pp. 160-168.
7. J. J. Lerou et al., "Microfabricated minichemical systems: Technical feasibility," Microsystem Technology for Chemical and Biological Microreactors, DECHEMA Monographs, 132, Frankfurt am Main, 1996, p. 51.
8. J. J. Lerou and K. M. Ng, "Chemical reaction engineering: A multiscale approach to a multiobjective task," Chem. Eng. Sci., vol. 51, pp. 1595-1614, 1996.
9. Jensen et al., "Reaction engineering for microreactor systems," presented at Microreaction Technology, Proc. First Int. Conf. Microreaction Technology, 1997.
10. Srinivasan et al., "Chemical performance and high temperature characterization of micromachined chemical reactors," in Int. Conf. Solid-State Sensors and Actuators, Dig. Tech. Papers, vol. 1, no. CD.01, 1997.
11. _, "Micromachined reactors for catalytic partial oxidation reactions," Reactors, Kinetics, and Catalysis, AIChE J., vol. 43, no. 11, pp. 3059-3069, Nov. 1997.
12. Y. C. Tai, L. S. Fan, and R. S. Muller, "IC-processed micro-motors: Design, technology and testing," in Proc. Micro Electro Mechanical Systems, IEEE Robotics and Automation Council, 1989, pp. 1-6.
13. M. Mehregany et al., "Operation of microfabricated harmonic and ordinary side-drive motors," in Proc.: IEEE Workshop on Micro Electro Mechanical Systems, 1990, pp. 1-8.
14. M. Mehregany, "Microfabricated silicon electric mechanisms." Ph.D. dissertation, Massachusetts Inst. Technol., Cambridge, MA, 1990.
15. C. H. Ahn and M. G. Allen, "A fully integrated micromagnetic actuator with a multilevel magnetic core," in Dig., IEEE Solid State Sensor and Actuator Workshop, Hilton Head, 1992, pp. 14-18.
16. C. H. Ahn, Y. J. Kim, and M. G. Allen, "A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils," in Proc. Micro Electro Mechanical Systems, IEEE Robotics and Automation Society, 1993, pp. 1-6.
17. Lee et al., "A miniaturized high-voltage solar cell array as an electrostatic MEMS power supply," IEEE J. Microelectromech. Syst., vol. 4, Sept. 1995.
18. J. B. Bates, G. R. Gruzalski, and C. F. Luck, "Rechargeable solid state lithium microbatteries," in Proc. Micro Electro Mechanical Systems, IEEE Robotics and Automation Society, 1993, pp. 1-6.
19. K. P. Brooks, C. J. Call, and M. K. Drost, "Integrated microchannel combustor/evaporator development," in Process Miniaturization: 2nd Int. Conf. Microreaction Technology, Topical Conference Reprints, 1998.
20. Tonkovich et al., "MicroChannel chemical reactors for fuel processing," in Process Miniaturization: 2nd Int. Conf. Microreaction Technology, Topical Conference Reprints, 1998.
21. 2-reaction in the explosion regime," in Process Miniaturization: 2nd Int. Conf. Microreaction Technology, Topical Conference Reprints, 1998.
22. C. Groshenry, "Preliminary study of a micro-gas turbine engine," S.M. dissertation, Massachusetts Inst. Technol., Cambridge, MA, 1995.
23. H. Miyajima and M. Mehregany, "High-aspect ratio photolithography for MEMS applications," IEEE J. Microelectromech. Syst., vol. 4, pp. 220-229, Dec. 1995.
24. R. Bosch Gmbh, Patents 4855017 and 4784720 (USA), and 4241045C1 (Germany).
25. Klaassen et al., "Silicon fusion bonding and deep reactive ion etching: A new technology for microstructures," presented at 8th Int. Conf. Solid-State Sensors and Actuators, and Eurosensors IX, Stockholm, 1995.
26. C. H. Hsu and M. A. Schmidt, "Micromachined structures fabricated using a wafer bonded sealed cavity process," in Tech. Dig., IEEE Sensors Workshop, Hilton Head, SC, 1994, pp. 151-155.
27. A. A. Ayón et al., "Etching characteristics and profile control in a time multiplexed inductively coupled plasma etcher," presented at the Solid-State Sensor and Actuator Workshop at Hilton Head, 1998.
28. W. Kern and D. A. Puotinen, "Cleaning solutions based on hydrogen peroxide for use in silicon semiconductor technology," RCA Rev., vol. 31, pp. 187-206, 1970.
29. M. A. Schmidt, "Silicon wafer bonding for micromechanical devices," presented at the Solid-State Sensor and Actuator Workshop at Hilton Head, 1994.
30. A. Mehra and I. A. Waitz, "Development of a hydrogen combustor for a microfabricated gas turbine engine," presented at the Solid-State Sensor and Actuator Workshop at Hilton Head, 1998.
31. B. E. Deal and A. S. Grove, "General relationships for the thermal oxidation of silicon," J. Appl. Phys., vol. 36, p. 3770, 1965.
32. S. M. Spearing and K. S. Chen, "Micro-gas turbine engine materials and structures," presented at the 21st Annu. Cocoa Beach Conf. Exposition on Composites, Advanced Ceramics, Materials and Structures, 1997.