Electric spring modeling for a comb actuator deformed by the footing effect in deep reactive ion etching

Journal of Micromechanics and Microengineering

Volumn 13, Issue 1, 2003, Pages 72-79

  Lee, June Young ^a   Kim, Seong Hyok ^a   Lim, Hyung Taek ^a   Kim, Che Heung ^a   Baek, Chang Wook ^a   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMIC RESPONSE; ELECTRIC POTENTIAL; ELECTRODES; REACTIVE ION ETCHING; RESONANCE;

ELECTRIC SPRING MODELING;

ACTUATORS;

EID: 0037233776     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/1/311     Document Type: Article

References (9)

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9. Ishihara Kei, Yung Chi-Fan, Ayon Arturo A and Schmidt Martin A 1999 An inertial sensor technology using DRIE and wafer bonding with interconnecting capability J. Microelectromech. Syst. 8 403-8