메뉴 건너뛰기




Volumn 67, Issue 1, 2007, Pages 39-47

Measurements of density and sticking probability of CN(X2Σ+) radicals by laser-induced fluorescence spectroscopy

Author keywords

Amorphous carbon nitride; Chemical vapor deposition (CVD); Plasma processing and deposition; Sticking probability

Indexed keywords

CALIBRATION; CARBON NITRIDE; CHEMICAL VAPOR DEPOSITION; DISCHARGE (FLUID MECHANICS); FLUORESCENCE SPECTROSCOPY; FREE RADICALS; PLASMA DEPOSITION; PROBABILITY DENSITY FUNCTION; RAYLEIGH SCATTERING;

EID: 33947640018     PISSN: 13861425     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.saa.2006.05.036     Document Type: Article
Times cited : (9)

References (38)
  • 29
    • 2942738831 scopus 로고
    • Griem H.R., and Loveberg R.H. (Eds), Academic Press, New York (Chapter 3)
    • DeSilva A.W., and Goldenbaum G.C. In: Griem H.R., and Loveberg R.H. (Eds). Methods of Experimental Physics vol. 9 (1970), Academic Press, New York (Chapter 3)
    • (1970) Methods of Experimental Physics , vol.9
    • DeSilva, A.W.1    Goldenbaum, G.C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.