Measurement of the active species density for the synthesis of amorphous carbon nitrides I. Metastable atoms and electrons in the microwave discharge flow of Ar

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 10, 2004, Pages 7277-7281

  Ito, Haruhiko ^a   Sato, Yoshinori ^a   Saitoh, Hidetoshi ^a  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Absolute density; Amorphous carbon nitride; Ar metastable; Ar+; Brcn; LIF; Microwave plasma

Indexed keywords

AMORPHOUS MATERIALS; ARGON; CARRIER CONCENTRATION; CHARGE TRANSFER; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; DIAMOND LIKE CARBON FILMS; ELECTRIC DISCHARGES; FLUORESCENCE; MICROWAVES; RAYLEIGH SCATTERING; SYNTHESIS (CHEMICAL);

ABSOLUTE DENSITY; AMORPHOUS CARBON NITRIDE; AR METASTABLE ATOMS; AR+; BRCN; LASER INDUCED FLUORESCENCE (LIF); LIF; MICROWAVE DISCHARGE; MICROWAVE PLASMA;

CARBON NITRIDE;

EID: 10844279971     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.7277     Document Type: Article

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