SAW chemical sensors based on AlGaN/GaN piezoelectric material system: Acoustic design and packaging considerations

Proceedings - EMAP 2005: 2005 International Symposium on Electronics Materials and Packaging

Volumn 2005, Issue , 2005, Pages 204-208

  Rufer, L ^a   Torres, A ^a   Mir, S ^a   Alam, M O ^b   Lalinsky, T ^c   Chan, Y C ^b  

^a TIMA LABORATORY   (France)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^c INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVE PROPAGATION; ELECTRONICS PACKAGING; GALLIUM NITRIDE; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC MATERIALS; SEMICONDUCTING ALUMINUM COMPOUNDS;

ACOUSTIC DESIGNS; PIEZOELECTRIC MATERIAL SYSTEMS; SENSOR DETECTION; SURFACE ACOUSTIC WAVES;

CHEMICAL SENSORS;

EID: 33847311685     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EMAP.2005.1598262     Document Type: Conference Paper

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