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Volumn 1, Issue , 2002, Pages 57-60
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High frequency SAW devices on AlGaN: Fabrication, characterization and integration with optoelectronics
b
CEA GRENOBLE
(France)
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC WAVE VELOCITY;
ALUMINUM NITRIDE;
GALLIUM NITRIDE;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
MOLECULAR BEAM EPITAXY;
MORPHOLOGY;
OPTOELECTRONIC DEVICES;
PHOTODETECTORS;
SAPPHIRE;
SEMICONDUCTING FILMS;
SEMICONDUCTOR DEVICE MANUFACTURE;
THERMODYNAMIC PROPERTIES;
HIGH FREQUENCY SURFACE ACOUSTIC DEVICES;
METAL SEMICONDUCTOR METAL PHOTODETECTOR;
PLASMA ASSISTED MOLECULAR BEAM EPITAXY;
ACOUSTIC SURFACE WAVE FILTERS;
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EID: 0036995588
PISSN: 10510117
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (24)
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References (8)
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