Hafnia sol-gel films synthesized from HfCl4: Changes of structure and properties with the firing temperature

Journal of Sol-Gel Science and Technology

Volumn 42, Issue 1, 2007, Pages 89-93

  Kidchob, Tongjit ^a   Malfatti, Luca ^a   Serra, Filomena ^a   Falcaro, Paolo ^b   Enzo, Stefano ^c   Innocenzi, Plinio ^a  

^a Nanoworld Institute   (Italy)

^b Associazione Civen   (Italy)

^c UNIVERSITY OF SASSARI   (Italy)

Author keywords

Films; Hafnia; Infrared spectroscopy; XRD

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; HAFNIUM COMPOUNDS; LIGHT TRANSMISSION; SOL-GELS; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; X RAY DIFFRACTION;

FIRING TEMPERATURE; HAFNIA FILMS; MONOCLINIC CRYSTALLINE; SPECTROSCOPIC ELLIPSOMETRY;

THIN FILMS;

EID: 33847236990     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10971-006-1511-9     Document Type: Article

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