Wavy and rough cracks in silicon

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 67, Issue 6 2, 2003, Pages

  Deegan, Robert D ^a   Chheda, Shilpa ^a   Patel, Lisa ^a   Marder, M ^a   Swinney, Harry L ^a   Kim, Jeechoon ^a   De Lozanne, Alex ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ATOMIC FORCE MICROSCOPY; COPPER; CRACKS; FRACTURE; SINGLE CRYSTALS; SURFACE ROUGHNESS; TEMPERATURE CONTROL; THERMAL GRADIENTS; THIN FILMS;

MICROSTEPPER MOTOR; SELF-AFFINE FRACTAL; SINGLE CRYSTAL SILICON; THIN FILM HEATER;

SILICON;

EID: 42749100517     PISSN: 1063651X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)

1. A. Yuse and M. Sano, Nature (London) 362, 329 (1993).
2. M. Marder, Phys. Rev. E 49, R51 (1994).
3. M. Adda-Bedia and Y. Pomeau, Phys. Rev. E 52, 4105 (1995).
4. B. Yang and K. Ravi-Chandar, J. Mech. Phys. Solids 49, 91 (2001).
5. O. Ronsin, F. Heslot, and B. Perrin, Phys. Rev. Lett. 75, 2352 (1995).
6. A. Yuse and M. Sano, Physica D 108, 365 (1997).
7. O. Ronsin and B. Perrin, Europhys. Lett. 38, 435 (1997).
8. O. Ronsin and B. Perrin, Phys. Rev. E 58, 7878 (1998).
9. R. V. Goldstein and R. L. Salganik, Int. J. Fract. 10, 507 (1974).
10. B. D. Ferney, M. R. DeVary, K. J. Hsia, and A. Needleman, [Scr. Mater. 41, 275 (1999)] report wavy cracks in silicon but give no details.
11. H. F. Wolf, Silicon Semiconductor Data (Pergamon Press, Oxford, 1969).
12. C. P. Chen and M. H. Leipold, Am. Ceram. Soc. Bull. 59, 469 (1980).
13. Y. S. Touloukian and E. H. Buyco, Thermophysical Properties of Matter (IFI/Plenum, New York, 1970).
14. J. Schmittbuhl, J. P. Villotte, and S. Roux, Phys. Rev. E 51, 131 (1995).
15. B. Lawn, Fracture of Brittle Solids, 2nd ed. (Cambridge University Press, Cambridge, 1993).
16. E. Brouchaud, J. Phys.: Condens. Matter 9, 4319 (1997), and references therein.
17. R. Thomson, C. Hseih, and V. Rana, J. Appl. Phys. 42(8), 3154 (1971).