Photo-assisted crystallization of zirconia thin films and their electrical evaluation

Thin Solid Films

Volumn 515, Issue 7-8, 2007, Pages 4004-4010

  Nishizawa, Kaori ^a   Miki, Takeshi ^a   Suzuki, Kazuyuki ^a   Kato, Kazumi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Crystallization; Electrical properties; Ultraviolet irradiation; Zirconia thin films

Indexed keywords

CRYSTALLIZATION; ELECTRIC PROPERTIES; IRRADIATION; PHOTOCHEMICAL REACTIONS; ULTRAVIOLET RADIATION; ZIRCONIA;

CRYSTALLINITY; ULTRAVIOLET IRRADIATION; ZIRCONIA THIN FILMS;

THIN FILMS;

EID: 33846922806     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.10.006     Document Type: Article

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