Excimer UV processing of (Bi,Nd)4Ti3O12 ferroelectric thin films by chemical solution deposition method

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 9 B, 2003, Pages 5981-5985

  Hayashi, Takashi ^a   Iizawa, Naoya ^a   Togawa, Daichi ^a   Yamada, Mio ^b   Sakamoto, Wataru ^b   Kikuta, Koichi ^b   Hirano, Shin Ichi ^b  

^a SHONAN INSTITUTE OF TECHNOLOGY   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

(Bi,Nd)4Ti3O12 thin film; Chemical solution deposition; Excimer UV irradiation; Ferroelectric properties; Low temperature crystallization

Indexed keywords

ACETONE; BISMUTH COMPOUNDS; CRYSTAL ORIENTATION; CRYSTALLIZATION; DEPOSITION; FERROELECTRICITY; GRAIN SIZE AND SHAPE; IRRADIATION; LOW TEMPERATURE OPERATIONS; MORPHOLOGY; SURFACES; ULTRAVIOLET RADIATION;

CHEMICAL SOLUTION DEPOSITION METHOD; EXCIMER ULTRAVIOLET PROCESSING; FERROELECTRIC PROPERTIES; LOW-TEMPERATURE CRYSTALLIZATION;

FERROELECTRIC THIN FILMS;

EID: 0344741498     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.5981     Document Type: Article

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