SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 140, Issue 3, 2001, Pages 206-214

Deposition of TiN thin films on Si(100) by HCD ion plating

(3) Chou, Wen Jun a Yu, Ge Ping a Huang, Jia Hong a

a NATIONAL TSING HUA UNIVERSITY (Taiwan)

Author keywords

HCD ion plating; Packing factor; Preferred orientation; Resistivity; TiN

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; ELECTRIC CONDUCTIVITY; FILMS; PLATING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

HOLLOW CATHODE DISCHARGE ION PLATING; NANOINDENTATION TESTS;

CERAMIC COATINGS;

COATING; INDUSTRIAL APPLICATION; ION PLATING; TITANIUM NITRIDE; WEAR RESISTANCE;

EID: 0035978380 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(01)01120-3 Document Type: Article

Times cited : (91)

References (22)

1
- 0022080421
- (1985) Thin Solid Films , vol.128 , pp. 21
- Sundgren, J.-E.¹

2
- 0032099609
- (1998) J. Mater. Eng. Perform , vol.7 , Issue.3 , pp. 324
- Chen, C.T.¹ Sung, Y.C.² Yu, G.-P.³ Huang, J.-H.⁴

3
- 0001149368
- (1996) J. Appl. Phys , vol.80 , pp. 6725
- Ljungcrantz, H.¹ Oden, M.² Hultman, L.³ Greene, J.E.⁴ Sundgen, J.-E.⁵

4
- 0025460204
- (1990) Phys. Stat. Solidi , vol.120 , Issue.a , pp. 175
- Wokulski, Z.¹

5
- 0031147325
- (1997) J. Appl. Phys , vol.81 , Issue.9 , pp. 6126
- Je, J.H.¹ Noh, D.Y.² Kim, H.K.³ Liang, K.S.⁴

6
- 0027912283
- (1993) Surf. Coat. Technol , vol.60 , pp. 446
- Kupczyk, M.¹

7
- 0031148283
- (1997) Corros. Sci , vol.39 , pp. 893
- Shieu, F.S.¹ Sung, Y.C.² Cheng, L.H.³ Huang, J.H.⁴ Yu, G.P.⁵

8
- 0345561649
- (1998) Surf. Coat. Technol , vol.110 , pp. 111
- Pan, W.-L.¹ Yu, G.-P.² Huang, J.-H.³

9
- 0032715634
- (1999) Surf. Coat. Technol , vol.111 , pp. 16
- Chen, B.F.¹ Pan, W.L.² Yu, G.P.³ Hwang, J.⁴ Huang, J.H.⁵

10
- 0033364925
- (1999) Thin Solid Films , vol.355-356 , pp. 440
- Huang, J.H.¹ Tsai, Y.-P.² Yu, G.-P.³

11
- 0004751448
- (1988) Mucl. Instrum. Methods , vol.33 B , pp. 649
- Fujimoto, F.¹

12
- 0003484135
- Academic Press, New York
- (1971) Transition Metal Carbides and Nitrides
- Toth, L.E.¹

13
- 0028467479
- (1994) Surf. Coat. Technol , vol.65 , pp. 90
- Ensinger, W.¹

14
- 0031547708
- (1997) Nucl. Instrum. Methods , vol.127-128 B , pp. 796
- Ensinger, W.¹

15
- 0041495999
- (1993) Nucl. Instrum. Methods , vol.80-81 B , pp. 1409
- Ensinger, W.¹ Rauschenbach, B.²

16
- 0002367696
- (1998) Surf. Coat. Technol , vol.99 , pp. 1
- Ensinger, W.¹

17
- 0006712597
- (1989) J. Apppl. Phys , vol.66 , pp. 536
- Hultmann, L.¹ Sundgren, J.-E.²

18
- 0000564539
- (1990) J. Appl. Phys , vol.67 , pp. 2670
- Chous, T.C.¹

19
- 0031257502
- (1997) Mater. Chem. Phys , vol.50 , pp. 248
- Shieu, F.S.¹ Cheng, L.H.² Sung, Y.C.³ Huang, J.H.⁴ Yu, G.P.⁵

20
- 0026120399
- (1991) Thin Solid Films , vol.197 , pp. 117
- Pelleg, J.¹ Zevin, L.Z.² Lungo, S.³ Croitora, N.⁴

21
- 0003602826
- Academic Press, New York
- (1992) The Materials Science of Thin Films , pp. 87
- Ohring, M.¹

22
- 0002440967
- W.D. Sproul, J.E. Greene, J.A.Thornton (Eds.), American Institute of Physics, MA
- (1986) Physics and Chemistry of Protective Coatings , pp. 95
- Sundgren, J.E.¹ Johansson, B.O.² Rockett, A.³ Barnett, S.A.⁴ Greene, J.E.⁵

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