Effect of Al addition on the microstructure and electronic structure of Hf O2 film

Journal of Applied Physics

Volumn 101, Issue 1, 2007, Pages

  Wang, X F ^a   Li, Quan ^a   Egerton, R F ^b   Lee, P F ^c   Dai, J Y ^c   Hou, Z F ^d   Gong, X G ^d  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^b UNIVERSITY OF ALBERTA   (Canada)

^c HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^d FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL SYMMETRY; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRONIC STRUCTURE; HAFNIUM COMPOUNDS; MICROSTRUCTURE;

HAFNIUM ALUMINATE; RADIAL DISTRIBUTION FUNCTIONS; VALENCE ELECTRON;

THIN FILMS;

EID: 33846321227     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2405741     Document Type: Article

References (41)

1. G. D. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. 89, 5243 (2001).
2. R. M. Wallace and G. D. Wilk, Crit. Rev. Solid State Mater. Sci. 28, 231 (2003).
3. J. Robertson, Eur. Phys. J.: Appl. Phys. 28, 265 (2004).
4. D. A. Neumayer and E. Cartier, J. Appl. Phys. 90, 1801 (2001).
5. H. Y. Yu, N. Wu, M. F. Li, C. X. Zhu, and B. J. Cho, Appl. Phys. Lett. 81, 376 (2002).
6. W. Zhu, T. P. Ma, T. Tamagawa, J. Kim, R. Carruthers, M. Gibson, and T. Furukawa, Tech. Dig. - Int. Electron Devices Meet. 2001, 20.4.1.
7. Y. E. Hong, Y. S. Kim, K. Do, D. Lee, and D. H. Koa, J. Vac. Sci. Technol. A 23, 1413 (2005).
8. H. Y. Yu, M. F. Li, B. J. Cho, C. C. Yeo, and M. S. Joo, Appl. Phys. Lett. 81, 376 (2002).
9. W. J. Zhu, T. Tamagawa, M. Gibson, T. Furukawa, and T. P. Ma, IEEE Electron Device Lett. 23, 649 (2002).
10. S. H. Bae, C. H. Lee, R. Clark, and D. L. Kwong, IEEE Electron Device Lett. 24, 556 (2003).
11. M. H. Cho, D. W. Moon, S. A. Park, Y. K. Kim, and K. Jeong, Appl. Phys. Lett. 84, 5243 (2004).
12. Y. Q. Wang, J. H. Chen, W. J. Yoo, Y. C. Yeo, S. J. Kim, R. Gupta, and Y. L. Tan, Appl. Phys. Lett. 84, 5407 (2004).
13. D. J. H. Cockayne and D. R. McKenzie, Acta Crystallogr., Sect. A: Found. Crystallogr. A44, 870 (1988).
14. D. J. H. Cockayne, D. R. McKenzie, W. McBride, C. Goringe, and D. McCulloch, Microsc. Microanal. 6, 329 (2000).
15. R. F. Egerton, Electron Energy-Loss Spectroscopy in the Electron Microscope, 2nd ed. (Plenum, New York, 1996).
16. J. Daniels, C. V. Festenberg, H. Reather, and K. Zeppenfeld, Springer Tracts in Modern Physics (Springer, Berlin, 1970), Vol. 54.
17. Y. Y. Wang, Ultramicroscopy 33, 151 (1990).
18. J. A. Speer and B. J. Cooper, Am. Mineral. 67, 804 (1982).
19. D. Ozkaya, W. McBride, and D. J. H. Cockayne, Interface Sci. 12, 321 (2004).
20. G. Gutierrez and B. Johansson, Phys. Rev. B 65, 104202 (2002).
21. N. I. Medvedeva, V. P. Zhukov, M. Y. Khodos, and V. A. Gubanov, Phys. Status Solidi B 160, 517 (1990).
22. P. K. de Boer and R. A. de Groot, J. Phys.: Condens. Matter 10, 10241 (1998).
23. J. Robertson, J. Vac. Sci. Technol. B 18, 1785 (2000).
24. I. Popava, V. Zhukov, J. T. Yates, and J. G. Chen, J. Appl. Phys. 86, 7156 (1999).
25. G. D. Wilk and D. A. Muller, Appl. Phys. Lett. 83, 3984 (2003).
26. D. W. McComb, Phys. Rev. B 54, 7094 (1996).
27. D. Vlachos, A. J. Craven, and D. W. McComb, J. Phys.: Condens. Matter 13, 10799 (2001).
28. R. H. French, S. J. Glass, F. S. Ohuchi, Y. N. Xu, and W. Y. Ching, Phys. Rev. B 49, 5133 (1994).
29. S. Ostanin, A. J. Craven, D. W. McComb, D. Vlachos, A. Alavi, M. W. Finnis, and A. T. Paxton, Phys. Rev. B 62, 14728 (2000).
30. S. Stemmer, Z. Q. Chen, W. J. Zhu, and T. P. Ma, J. Microsc. 210, 74 (2003).
31. B. W. Busch, O. Pluchery, Y. J. Chabal, D. A. Muller, R. L. Opila, J. R. Kwo, and E. Garfunkel, MRS Bull. 27, 206 (2002).
32. S. Ramanathan, D. A. Muller, G. D. Wilk, C. M. Park, and P. C. McIntyre, Appl. Phys. Lett. 79, 3311 (2001).
33. D. Lim, R. Haight, M. Copel, and E. Cartier, Appl. Phys. Lett. 87, 072902 (2005).
34. X. Guo, Phys. Status Solidi A 183, 261 (2001).
35. S. K. Kim, Y. Kim, and J. Hong, J. Appl. Phys. 97, 073519 (2005).
36. Q. Li, K. M. Koo, W. M. Lau, P. F. Lee, J. Y. Dai, Z. F. Hou, and X. G. Gong, Appl. Phys. Lett. 88, 182903 (2006).
37. S. D. Mo and W. Y. Ching, Phys. Rev. B 57, 15219 (1998).
38. I. Levin and D. Brandon, J. Am. Ceram. Soc. 81, 1995 (1998).
39. J. E. Jaffe, R. Pandey, and A. B. Kunz, Phys. Rev. B 43, 14030 (1991).
40. R. Reiche, F. Yubero, J. P. Espinos, and A. R. Gonzalez-Elipe, Surf. Sci. 457, 199 (2000).
41. C. Colliex, M. Gasgnier, and P. Trebbia, J. Phys. (France) 37, 397 (1976).