Simulation and measurements of the piezoelectric properties response (d33) of piezoelectric layered thin film structures influenced by the top-electrode size

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 2005, Pages 7-10

  Prume, Klaus ^a   Gerber, Peter ^b   Kügeler, Garsten ^b   Roelofs, Andreas ^c   Böttgert, Ulrich ^b   Waser, Rainer ^b   Schmitz Kempen, Thorsten ^a   Tiedke, Stephan ^a  

^a AIXACCT SYSTEMS GMBH   (Germany)

^b RWTH AACHEN UNIVERSITY   (Germany)

^c SEAGATE TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC VARIABLES MEASUREMENT; ELECTRODES; FINITE ELEMENT METHOD; INTERFEROMETERS; LASER BEAMS; PERMITTIVITY; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; STRAIN; STRESS ANALYSIS; THERMAL EFFECTS;

FINITE ELEMENT SIMULATION; LASER INTERFEROMETERS; PIEZOELECTRIC THIN FILMS; ROOM TEMPERATURE (RT);

THIN FILMS;

EID: 28144440507     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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