Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications

Journal of Materials Research

Volumn 21, Issue 12, 2006, Pages 3037-3046

  Gupta, S ^a,b   Williams, O A ^c   Patel, R J ^a   Haenen, K ^c  

^a MISSOURI STATE UNIVERSITY   (United States)

^b UNIVERSITY OF MISSOURI   (United States)

^c HASSELT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; MOLECULAR DYNAMICS; MORPHOLOGY; NANOSTRUCTURED MATERIALS; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

FRICTIONAL PROPERTIES; INTERMOLECULAR FORCES; NANO-ELECTROMECHANICAL DEVICES; RESIDUAL STRESS DISTRIBUTION;

DIAMOND FILMS;

EID: 33846277585     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2006.0372     Document Type: Article

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