Modular design of AFM probe with sputtered silicon tip

Sensors and Actuators, A: Physical

Volumn 92, Issue 1-3, 2001, Pages 96-101

  Rasmussen, P A ^a   Thaysen, J ^a   Bouwstra, S ^a   Boisen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

AFM; Multilayer beam; Piezoresistive read out; Rocket tip; Sputtered silicon

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; IMAGING TECHNIQUES; OPTICAL DESIGN; REACTIVE ION ETCHING; SILICON; SPUTTERING; THICKNESS CONTROL; THIN FILMS;

DEFLECTION SENSITIVITY; MICROMACHINED CANTILEVER; MODULAR DESIGN; PIEZORESISTIVE READ-OUT; POLYSILICON RESISTORS; SPUTTERED SILICON;

PROBES;

EID: 0035425736     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00545-3     Document Type: Article

References (11)

1. Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical Wheatstone bridge arrangement
2. Atomic force microscopy using a piezoresistive cantilever
3. Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers
4. Fabrication and parallel operation of 5 × 5 2D AFM cantilever array for data storage and imaging
5. Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage
6. Environmental sensors based on micromachined cantilevers with integrated read-out
7. AFM probes with directly fabricated tips
8. Formation of silicon tips with ≤1 nm radius
9. Experimental studies on 1/f noise
10. 1/f noise investigations in small channel armorphous silicon thin film transistors