Silicon micromachined high-shock accelerometers with a curved-surface-application structure for over-range stop protection and free-mode-resonance depression

Journal of Micromechanics and Microengineering

Volumn 12, Issue 6, 2002, Pages 742-746

  Dong, Jian ^a,b   Li, Xinxin ^a   Wang, Yuelin ^a   Lu, Deren ^a   Ahat, Shawkret ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; ELECTRIC CONDUCTIVITY; FREQUENCY DOMAIN ANALYSIS; MICROMACHINING; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING; SILICON WAFERS; THERMOOXIDATION; TIME DOMAIN ANALYSIS;

DEEP-REACTION IONIC ETCHING; DROPPING-HAMMER TESTING SYSTEM; HIGH-SHOCK ACCELEROMETER;

MICROSENSORS;

EID: 0036851963     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/6/304     Document Type: Article

References (6)

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