Principles of space-charge based bi-stable MEMS: The junction-MEMS

Sensors and Actuators, A: Physical

Volumn 133, Issue 1, 2007, Pages 173-179

  Sallese, Jean Michel ^a   Bouvet, Didier ^a  

^a EPFL   (Switzerland)

Author keywords

Bi stability; Junction; MEMS; RF; Space charge; Switch

Indexed keywords

ELECTRIC POTENTIAL; ELECTRIC SPACE CHARGE; ELECTROSTATICS; MICROELECTRONICS; SEMICONDUCTOR JUNCTIONS; SWITCHES;

BI-STABILITY; ELECTROSTATIC FORCES; RF;

MICROELECTROMECHANICAL DEVICES;

EID: 33845576089     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.03.024     Document Type: Article

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