A surface micromachined bistable switch

Canadian Conference on Electrical and Computer Engineering

Volumn 1, Issue , 2002, Pages 465-469

  Foulds, I ^a   Trinh, M ^a   Hu, S ^a   Liao, S ^a   Johnstone, R ^a   Parameswaran, M ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

Bistable; MEMS; Optics; Surface micromachine; Switch

Indexed keywords

ANIMATION; COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; ELECTRIC POWER SYSTEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL FIBERS;

BISTABLE SWITCHES; SURFACE MICROMACHINES;

OPTICAL SWITCHES;

EID: 0036065467     PISSN: 08407789     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)