MEMS-based capacitor arrays for programmable interconnect and RF applications

Proceedings - 20th Anniversary Conference on Advanced Research in VLSI, ARVLSI 1999

Volumn , Issue , 1999, Pages 369-377

  Duewer, B E ^a   Wilson, J M ^a   Winick, D A ^a   Franzon, P D ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; VLSI CIRCUITS;

CAPACITOR ARRAYS; CONNECTIVITY FUNCTION; ESSENTIAL ELEMENTS; IN-BUILDINGS; PHASED ARRAY BEAM STEERING; PROGRAMMABLE INTERCONNECT; RF APPLICATIONS; SYSTEM LEVELS;

INTEGRATED CIRCUIT INTERCONNECTS;

EID: 0742311967     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ARVLSI.1999.756061     Document Type: Conference Paper

References (9)

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