Magnetic, out-of-plane, totaly integrated bistable μ-actuator

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1366-1370

  Rostaing, H ^a,b   Stepanek, J ^a   Cugat, O ^a   Dieppedale, C ^b   Delamare, J ^a  

^a LABORATOIRE D ELECTROTECHNIQUE DE GRENOBLE   (France)

^b CEA LETI   (France)

Author keywords

Bistable; High current density; Magnet; Micro actuator; Relay

Indexed keywords

BISTABLE; HIGH CURRENT DENSITY; RELAY; VERTICAL DISPLACEMENT;

CURRENT DENSITY; INTEGRATION; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; PERMANENT MAGNETS; PROBLEM SOLVING; SOFTWARE PROTOTYPING; SWITCHING;

MICROACTUATORS;

EID: 27544489913     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1497335     Document Type: Conference Paper

References (10)

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