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Chemical Vapor Deposition

Volumn 12, Issue 6, 2006, Pages 345-352

Formation of freestanding single-walled carbon nanotubes by plasma-enhanced CVD

(2) Kato, Toshiaki a Hatakeyama, Rikizo a

a TOHOKU UNIVERSITY (Japan)

Author keywords

Diffusion plasma; Freestanding structures; PECVD; Plasma sheath; SWNTs

Indexed keywords

GROWTH KINETICS; MEASUREMENT THEORY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

DIFFUSION PLASMAS; FREESTANDING STRUCTURES; PLASMA SHEATH; SINGLE-WALLED CARBON NANOTUBES (SWNT);

CARBON NANOTUBES;

EID: 33845571972 PISSN: 09481907 EISSN: 15213862 Source Type: Journal
DOI: 10.1002/cvde.200506451 Document Type: Article

Times cited : (30)

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