Low actuation voltage capacitive shunt RF-MEMS switch having a corrugated bridge

IEICE Transactions on Electronics

Volumn E89-C, Issue 12, 2006, Pages 1880-1887

  Song, Yo Tak ^a   Lee, Hai Young ^a   Esashi, Masayoshi ^b  

^a Ajou University   (South Korea)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Capacitive shunt switch; Corrugated bridge; Low actuation voltage; Microwave and millimeter wave; Residual stress; RF MEMS

Indexed keywords

ELECTRIC MEASURING BRIDGES; ELECTRIC POTENTIAL; MICROELECTROMECHANICAL DEVICES; MILLIMETER WAVE DEVICES; RESIDUAL STRESSES; SILICON; WAVEGUIDES;

CAPACITIVE SHUNT SWITCH; CORRUGATED BRIDGE; LOW-ACTUATION VOLTAGE; MICROWAVE AND MILLIMETER-WAVE; RF-MEMS;

ELECTRIC SWITCHES;

EID: 33845569491     PISSN: 09168524     EISSN: 17451353     Source Type: Journal    
DOI: 10.1093/ietele/e89-c.12.1880     Document Type: Conference Paper

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