High-isolation CPW MEMS shunt switches-part 1: Modeling

IEEE Transactions on Microwave Theory and Techniques

Volumn 48, Issue 6, 2000, Pages 1038-1044

  Muldavin, Jeremy B ^a   Rebeiz, Gabriel M ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33747335702     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.904742     Document Type: Article

References (10)

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3. J. J. Yao and M. F. Chang, "A surface micromachined miniature switch for telecommunications applications with signal frequencies from DC up to 4 GHz," in Int. Conf. Solid-State Sens. Actuators Dig., Stockholm, Sweden, June 1996, pp. 384-387.
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7. E. K. Chan, E. C. Kan, R. W. Dutton, and P. M. Pinsky, "Nonlinear dynamic modeling of micromachined microwave switches," in IEEE MTT-S Int. Microwave Symp. Dig., Denver, CO, June 1997, pp. 1511-1514.
8. G. E. Ponchak, "Development of Passive Components for Millimeter-Wave Circuits," Ph.D. dissertation, Elect. Eng. Comput. Sci. Dept., The Univ. Michigan at Ann Arbor, Ann Arbor, MI, 1997.
9. G. T. Mulhern, D. S. Soane, and R. T. Howe, "Supercritical carbon dioxide drying of microstructures," in 7th Int. Solid-State Sens. Actuators Conf., Yokohama, Japan, June 1993, pp. 296-299.
10. J. B. Muldavin and G. M. Rebeiz, "High isolation MEMS shunt switches - Part 2: Design," IEEE Trans. Microwave Theory Tech., vol. 48, pp. 1053-1056, June 1999.