Micromachined low actuation voltage RF MEMS capacitive switches, technology and characterization

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 2004, Pages 165-168

  Rangra, K J ^a   Giacomozzi, F ^b   Margesin, B ^b   Lorenzelli, L ^b   Mulloni, V ^b   Collini, C ^b   Marcelli, R ^c   Soncini, G ^a  

^a UNIVERSITY OF TRENTO   (Italy)

^b ITC IRST   (Italy)

^c CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTROPLATED PRODUCTS; GOLD; MICROELECTROMECHANICAL DEVICES; VOLTAGE CONTROL;

LOW ACTUATION VOLTAGE; MICROMACHINED SWITCHES; RF MEMS CAPACITIVE SWITCHES; SPRING SUSPENSIONS;

ELECTRIC SWITCHES;

EID: 27844488362     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. th Europ. Conf. On Solid State Trans., September 15-18, 2002. Prague, Czech Republic.
2. D. Peroulis, S.P. Pacheco, K. Sarabandi and L. P. B. Katehi, Proc. IEEE MTT-S Conference Boston, MA, pp 1217-1220, 2000.
3. L. Lorenzelli, K.J. Rangra, C. Collini, F. Giacomozzi, B. Margesin and P. Pianegiani, DTIP 2003, Cannes-Mandelieu France, 5-7 May 2003. pp 281-285.
4. Margesin Benno, IRST Internal Technical Memo May 2003.