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Sensors and Actuators, A: Physical

Volumn 92, Issue 1-3, 2001, Pages 312-317

A low-voltage torsional actuator for application in RF-microswitches

(6) Plotz F a,b Michaelis, S a Aigner, R a Timme, H J a Binder, J c Noe R b

a INFINEON TECHNOLOGIES AG (Germany)

b UNIVERSITY OF PADERBORN (Germany)

c UNIVERSITY OF BREMEN (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; INTEGRATED CIRCUIT MANUFACTURE; INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES; RESONANCE; VIBRATIONS (MECHANICAL); VOLTAGE MEASUREMENT;

BICMOS COMPATIBLE PROCESS; ELECTROMECHANICAL SIMULATION; INTEGRATED MICROSWITCHES; SOFTWARE PACKAGE MEMCAD; TORSIONAL ACTUATOR;

ACTUATORS;

EID: 0035425737 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/S0924-4247(01)00589-1 Document Type: Article

Times cited : (32)

References (7)

1
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- Microelectromechanical components for miniaturized low-power communications
- Proceedings of the 1999 IEEE MTT-S International Microwave Symposium RF-MEMS Workshop on Microelectromechanical Devices for Systems: Their Constructon, Reliability, and Application, Anaheim, CA, USA, 18 June 1999 , pp. 48-77
- Nguyen, C.T.-C.¹

2
- 0029543057
- A surface micromachined miniature switch for telecommunications applications with signal frequencies from dc up to 4 GHz
- Technical Digest of the 8th International Conference on Solid-State Sensors and Actuators (Transducers'95), and Eurosensors IX, Stockholm, Sweden, 25-29 June 1995 , pp. 384-387
- Yao, J.J.¹ Chang, M.F.²

3
- 0031677501
- A bistable microrelay based on two-segment multimorph cantilever actuators
- Proceedings of the IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems, Heidelberg, Germany, 25-29 January 1998 , pp. 154-159
- Sun, X.Q.¹ Gu, X.² Carr, W.N.³

4
- 0004506604
- Micromechanical relay with electrostatic actuation and metallic contacts
- Technical Digest of the 10th International Conference on Solid-State Sensors and Actuators (Transducers'99), Sendai, Japan, 7-10 June 1999
- Grétillat, M.-A.¹ Grétillat, F.² De Rooij, N.F.³

5
- 0033314265
- Low actuation voltage RF-MEMS switches with signal frequencies from 0.25 to 40 GHz
- Proceedings of the International Electronic Devices Meeting 1999, WA, USA, 5-8 December 1999 , pp. 689-692
- Shen, S.-C.¹ Feng, M.²

6
- 0033149639
- Micromachined low-loss microwave switches
- (1999) IEEE J. Microelectromech. Syst. , vol.8 , pp. 129-134
- Yao, Z.J.¹ Goldsmith, C.² Eshelman, S.³ Denniston, D.⁴

7
- 0034250943
- Acceleration threshold switches from an additive electroplating process
- (2000) Sens. Actuators , vol.85 , pp. 418-423
- Michaelis, S.¹ Timme, H.-J.² Wycisk, M.³ Binder, J.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.