Corrugated diaphragm for piezoelectric microphone

IEEE Symposium on Emerging Technologies & Factory Automation, ETFA

Volumn 2, Issue , 1996, Pages 503-506

  Yan, Hai ^a   Kim, Eun Sok ^a  

^a UNIVERSITY OF HAWAII   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; MICROMACHINING; MICROPHONES; RESIDUAL STRESSES;

CORRUGATED DIAPHRAGM; MICROMACHINED PIEZOELECTRIC MICROPHONE;

PIEZOELECTRIC DEVICES;

EID: 0030378443     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)