On the profile of frequency dependent series resistance and dielectric constant in MIS structure

Microelectronic Engineering

Volumn 84, Issue 1, 2007, Pages 180-186

  Yücedaǧ, I ^a   Altindal, Ş ^a   Tataroglu A ^a  

^a GAZI UNIVERSITY   (Turkey)

Author keywords

Electrical and dielectric properties; Frequency dependence; Insulator layer; MIS diode; Series resistance; Surface states

Indexed keywords

CAPACITANCE MEASUREMENT; ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE; FREQUENCY STABILITY; PERMITTIVITY; POLYSILICON; SILICA; VOLTAGE DISTRIBUTION MEASUREMENT; VOLTAGE MEASUREMENT;

DENSITY OF SURFACE STATES; DIELECTRIC LOSS; INSULATOR LAYER; SURFACE STATES;

SEMICONDUCTOR DIODES;

EID: 33751436053     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.10.071     Document Type: Article

References (33)

1. Nicollian E.H., and Brews J.R. MOS (Metal-Oxide-Semiconductor) Physics and Technology (1982), John Wiley & Sons, New York
2. Kar S., and Dahlke W.E. Solid-state Electron. 15 (1972) 221
3. Kar S., and Narasimhan R.L. J. Appl. Phys. 61 12 (1987) 5353
4. Schulz M., and Klausmann E. Appl. Phys. 18 (1979) 169
5. Depas M., Van Meirhaeghe R.L., Lafere W.H., and Cardon F. Solid-state Electron. 37 3 (1994) 433
6. Konofaos N., McClean I.P., and Thomas C.B. Phys. Stat. Sol. A 161 (1997) 111
7. Bülbül M.M., Zeyrek S., Alti{dotless}ndal S., and Yüzer H. Microelectron. Eng. 83 (2006) 577
8. Tataroǧlu A., Alti{dotless}ndal S., Karadeniz S., and Tuǧluoǧlu N.. Microelectron J. 34 (2003) 1043
9. Kanbur H., Alti{dotless}ndal S., and Tataroǧlu A. Appl. Surf. Sci. 252 (2005) 1732
10. Tataroǧlu A., Alti{dotless}ndal S., and Bülbül M.M. Microelectron. Eng. 81 (2005) 140
11. Haddara H.S., and El-Sayed M. Solid-state Electron. 31 8 (1988) 1289
12. Hung K.K., and Cheng Y.C. J. Appl. Phys 62 10 (1987) 4204
13. Castagne R., and Vapaille A. Surf. Sci. 28 1 (1971) 157
14. Kelberlau U., and Kassing R. Solid-state Electron. 22 1 (1979) 37
15. Kuhn M. Solid-state Electron. 13 6 (1970) 873
16. Deuling H., Klausmann E., and Goetzberger A. Solid-state Electron. 15 5 (1972) 559
17. Varma S., Rao K.V., and Kar S. J. Appl. Phys. 56 (1984) 2812
18. Kwa K.S.K., Chattopadhyay S., Jankovic N.D., Olsen S.H., Driscoll L.S., and O'Niell A.G. Semicond. Sci. Technol. 18 (2003) 82
19. Chattopadhyay P., and Raychaudhuri B. Solid-state Electron. 35 (1992) 875
20. Singh A. Solid-state Electron. 28 3 (1985) 223
21. Ouennoughi Z. Phys. Stat. Sol. A 160 (1967) 127
22. Konofaos N., and Evangelau E.K. Semicon. Sci. Technol. 18 (2003) 56
23. Szatkowski J., and Sieranski K. Solid-state Electron. 35 (1992) 1013
24. Şahin B., Çetin H., and Ayyi{dotless}ldi{dotless}z E. Solid-state Commun. 135 (2005) 490
25. Alti{dotless}ndal S., Dökme I., Bülbül M.M., Yalçi{dotless}n N., and Serin T. Microelektron. Eng. 83 (2006) 499
26. Hill W.A., and Coleman C.C. Solid-state Electron. 23 (1980) 987
27. Norde H. J. Appl. Phys. 50 (1979) 5052
28. Cheung S.K., and Cheung N.W. Apply. Phys. Lett. 49 (1986) 85
29. Chattopadhyay P., and Raychaudhuri B. Solid-state Electron. 36 (1992) 605
30. Tataroǧlu B., Alti{dotless}ndal S., and Tataroǧlu A. Microelectron. Eng. 83 (2006) 2021
31. Rajasekar K., Subbarayan A., and Sathyamoorthy R. Sol. Energy Mater. & Sol. Celss 90 (2006) 2515
32. Cutroni M., Mandanici A., Piccolo A., Fanggao C., Saunders G.A., and Mustarelli P. Solid-state Electron. 90 (1996) 167
33. Fanggao C., Sounders G.A., Lambson E.F., Hampton R.N., Carini G., Marco G.D., and Lanza M. J. Poly. Sci. 34 (1996) 425