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Volumn 161, Issue 1, 1997, Pages 111-123
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Characterisation of the interface states between amorphous diamond-like carbon films and (100) silicon
a,b a,c a,c |
Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
ANNEALING;
CHEMICAL VAPOR DEPOSITION;
CURVE FITTING;
DIAMOND FILMS;
ELECTRONIC DENSITY OF STATES;
FILM GROWTH;
MATHEMATICAL MODELS;
METAL INSULATOR BOUNDARIES;
METHANE;
SEMICONDUCTING SILICON;
STATISTICAL METHODS;
DIAMOND LIKE CARBON FILMS;
METAL INSULATOR SEMICONDUCTOR DEVICES;
SEMICONDUCTOR JUNCTIONS;
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EID: 0031145205
PISSN: 00318965
EISSN: None
Source Type: Journal
DOI: 10.1002/1521-396X(199705)161:1<111::AID-PSSA111>3.0.CO;2-U Document Type: Article |
Times cited : (49)
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References (28)
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