Properties of ITO films prepared by reactive magnetron sputtering

Microchimica Acta

Volumn 156, Issue 1-2, 2006, Pages 61-67

  Kleinhempel, Ronny ^a   Kaune, Gunar ^a   Herrmann, Matthias ^a   Kupfer, Hartmut ^a   Hoyer, Walter ^a   Richter, Frank ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Dual magnetron sputtering; ITO thin films; Optical properties; Oxygen flow rate; Residual stress

Indexed keywords

EID: 33751424398     PISSN: 00263672     EISSN: 14365073     Source Type: Journal    
DOI: 10.1007/s00604-006-0591-0     Document Type: Conference Paper

References (21)

1. H Izumi F O Adurodija T Kaneyoshi T Ishihara H Yoshioka M Motoyama 2002 J Appl Phys 91 3 1213
2. H Kim J S Horwitz A Pique C M Gilmore D B Chrisey 1999 Appl Phys A 69 447
3. I Hamberg C G Granqvist 1986 J Appl Phys 60 11 R123
4. Y Shigesato S Takaki T Haranoh 1992 J Appl Phys 71 7 3356
5. P K Song Y Shigesato I Yasui C W Ow-Yang D Paine 1998 Jpn J Appl Phys 37 1870
6. M Higuchi S Uekusa R Nakano K Yokogawa 1993 J Appl Phys 74 11 6710
7. D Mergel M Schenkel M Ghebre M Sulkowski 2001 Thin Solid Films 392 91
8. D Mergel W Stass G Ehl D Barthel 2000 J Appl Phys 88 5 2437
9. J Lee H Jung D Lim K Yang W Song J Yi 2005 Thin Solid Films 480-481 157
10. W Fukarek H Kersten 1994 J Vac Sci Technol A12 2 523
11. L Meng M dos Santos 1997 Thin Solid Films 303 15
12. I C Noyan J B Cohen 1987 Residual stress Springer New York
13. Y H Cheng H Kupfer U Krause T Kopte C Peters F Richter 2004 Surf Coat Technol 177-178 784
14. R A Synowicki 1998 Thin Solid Films 313-314 394
15. Y S Jung 2004 Thin Solid Films 467 36
16. Powder Diffraction File, Joint Committee on Powder Diffraction Standards, ASTM, Philadelphia, Card 06-0416
17. M Quaas C Eggs H Wulff 1998 Thin Solid Films 332 277
18. Th H de Keijser J I Langford E J Mittemeijer A B P Vogels 1982 J Appl Cryst 15 308
19. D G Neerinck T J Vink 1996 Thin Solid Films 278 12
20. F M d' Heurle J M E Harper 1989 Thin Solid Films 17 81
21. T Sasabayashi N Ito E Nishimura M Kon P K Song K Utsumi A Kaijo Y Shigesato 2003 Thin Solid Films 445 219