Depth profiling of thin ITO films by grazing incidence X-ray diffraction

Thin Solid Films

Volumn 278, Issue 1-2, 1996, Pages 12-17

  Neerinck, D G ^a,b   Vink, T J ^b  

^a Bekaert sa   (Belgium)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Depth profiling; Elastic properties; Indium oxide; Tin oxide; X ray diffraction

Indexed keywords

ANNEALING; ELASTIC MODULI; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING TIN COMPOUNDS; SEMICONDUCTOR DOPING; SPUTTER DEPOSITION; THERMAL EFFECTS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

DEPTH PROFILING; GRAZING INCIDENCE; TIN DOPED INDIUM OXIDE FILMS;

SEMICONDUCTING FILMS;

EID: 0030146540     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)08117-8     Document Type: Article

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