Ultra-shallow junction by laser annealing: Integration issues and modelling

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 253, Issue 1-2, 2006, Pages 1-8

  La Magna, Antonino ^a   Alippi, Paola ^a   Deretzis, Ioannis ^a   Privitera, Vittorio ^a   Fortunato, Guglielmo ^b   Mariucci, Luigi ^b   Magrì, Angelo ^c   Monakhov, Edouard ^d   Svensson, Bengt ^d  

^a CNR IMM   (Italy)

^b IFN CNR   (Italy)

^c STMICROELECTRONICS   (Italy)

^d UNIVERSITY OF OSLO   (Norway)

Author keywords

Defects kinetics; Matter radiation interaction; Monte Carlo method; Phase field method; Phase transitions

Indexed keywords

ANNEALING; COMPUTATIONAL METHODS; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ELECTRONICS ENGINEERING; INTEGRATION; MONTE CARLO METHODS; NANOTECHNOLOGY; PHASE TRANSITIONS; PROBLEM SOLVING;

DEFECTS KINETICS; MATTER RADIATION INTERACTION; PHASE FIELD METHOD;

SEMICONDUCTOR LASERS;

EID: 33751326852     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.10.004     Document Type: Article

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